lnfeed Grinding of Silicon Wafers Applying Electrophoretic Deposition of Ultrafine Abrasives Y. Tani' (21, T. Saekil, Y. Samitsuz, K. Kobayashiz, Y. Sat03 1 Institute of Industrial Science, University of Tokyo 20kamoto Machine Tool Works, Ltd. 3Shin-Nissan Diamond Tools Mfg. Co., Ltd., Japan Received on December 29,1997 Abstract The application of electrophoretic deposition of ultrafine ...